HIPIMS
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Fundamentals and Applications of HIPIMS EPSRC Grant
Understanding the fundamentals of HIPIMS plasma
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PVD Plasma Characterisation of the ABS Plasma Environment
As part of an ongoing programme of fundamental studies, the plasma produced during the coating cycle is being studied in an attempt to link plasma properties to physical film properties
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Plasma Investigations of the HIPIMS Discharge Industrial funding
High Power Impulse Magnetron Sputtering (HIPIMS) has been developed on rotating PVD magnetron sources for uniform deposition on 200mm single wafer tools for barrier and seed layer deposition in through silicon vias (TSV)
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Droplet Free Metal Ion Sources for PVD Coating production
To meet continuous demands for improved performance of the state of art hard coatings for tribological applications it is necessary to incorporate novel plasma assisted deposition technology into the present coating equipment providing better control over the energy of film forming species
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HIPIMS
Licensed process for the upscaling and implementation of High Power Impulse Magnetron Sputtering technology for the deposition of hard coatings