Duration: 1999-present

As part of an ongoing programme of fundamental studies, the plasma produced during the coating cycle is being studied in an attempt to link plasma properties to physical film properties.

Current interests of the group are

High Power Impulse Magnetron Sputtering
Cathodic Arc Plasmas
Magnetron Sputtering
RF Coil Enhanced Magnetron Sputtering

The group utilises a number of plasma diagnostic techniques

• Optical Emission Spectroscopy (OES) is performed using a Czerny-Turner monochromator with resolution of 0.12 nm (Jobin Yvon Triax 320) equipped with a photomultiplier tube (PMT) as a detector. The emission is collected in vacuo using a quartz fibre and collimator assembly positioned in the vacuum chamber, allowing spatially resolved studies to be performed. The accessible spectral range spans the ultra violet (UV), visible, and low infrared (IR) regions between emission wavelengths 200 - 850 nm, allowing the detection of multiply charged metal ions generated e.g. in arc discharges, as well as emission from neutral or ionised metal, inert gas (Ar), and reactive gas (N2) species.
• Time resolved OEST studies can also be performed taking advantage of the extremely fast rise time (20 ns) and great sensitivity of the PMT detector (Hamamatsu R920).
• Electrostatic probe diagnostics is performed using cylindrical and flat probes. Residual gas mass spectroscopy is performed using a differentially pumped mass analyser (Hiden Instruments) allowing the gas composition in the chamber to be monitored even during coating deposition (pressure up to 10-2 mbar).

Project staff: Dr A P Ehiasarian, Dr Roger New